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The aim of Microelectronic Engineering is to bring together in one publication the results of European, American and Japanese work in the rapidly expanding field of integrated microelectronic, optic and optoelectronic devices. Microelectronic Engineering is an archival, peer-reviewed journal. It publishes full research papers, short communications, and review articles. The scope of this Journal includes materials, methods and designs for microfabrication, processing and inspection for microelectronic and optoelectronic elements from centimeters to nanometers.

The wide range of topics covered by the journal include:

1. Lithography

2. Pattern Transfer

3. Materials

4. Inspection and Testing

5. Advanced Processing

6. Micromechanical Structures

7. Advanced Devices